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1

Analysis of Processing Mechanism in Stealth Dicing of Ultra Thin Silicon Wafer

OHMURA, Etsuji, KUMAGAI, Masayoshi, NAKANO, Makoto, KUNO, Koji, FUKUMITSU, Kenshi, MORITA, Hideki

Journal:

Journal of Advanced Mechanical Design Systems and Manufacturing

Year:

2008

Language:

english

File:

PDF, 1014 KB

english, 2008

2

Crack Propagation in Glass by Laser Irradiation Along Laser Scribed Line

Yamamoto, Koji, Hasaka, Noboru, Morita, Hideki, Ohmura, Etsuji

Journal:

Journal of Manufacturing Science and Engineering

Year:

2009

Language:

english

File:

PDF, 527 KB

english, 2009

3

Analysis of Internal Modified-Layer Formation Mechanism into Silicon Single Crystal with Nanosecond Laser

OHMURA, Etsuji, FUKUMITSU, Kenshi, KUMAGAI, Masayoshi, MORITA, Hideki

Journal:

TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series C

Year:

2008

File:

PDF, 11.05 MB

2008

4

[IEEE 2006 International Symposium on Semiconductor Manufacturing (ISSM) - Tokyo, Japan (2006.09.25-2006.09.27)] 2006 IEEE International Symposium on Semiconductor Manufacturing - Advanced dicing technology for semiconductor wafer -Stealth Dicing

Kumagai, Masayoshi, Uchiyama, Naoki, Ohmura, Etsuji, Sugiura, Ryuji, Atsumi, Kazuhiro, Fukumitsu, Kenshi

Year:

2006

Language:

english

File:

PDF, 2.98 MB

english, 2006

5

Process Anatomy for High Aspect Ratio Micro-Hole Drilling with Short Micro-Second Pulses Using a CW Single-Mode Fiber

Tu, Jay, Lehman, Ted, Paleocrassas, Alexander G., Harp, Wm. Ray, Noguchi, Satoru, Ohmura, Etsuji

Journal:

Applied Physics Research

Year:

2013

Language:

english

File:

PDF, 2.86 MB

english, 2013

6

Computer Simulation on Structural Changes of Hypoeutectoid Steel in Laser Transformation Hardening Process

OHMURA, Etsuji, INOUE, Katsunori, HARUTA, Koichi

Journal:

JSME international journal. Ser. A, Mechanics and material engineering

Year:

1989

File:

PDF, 1.30 MB

1989

7

[IEEE 2007 International Symposium on Semiconductor Manufacturing - Santa Clara, CA, USA (2007.10.15-2007.10.17)] 2007 International Symposium on Semiconductor Manufacturing - Laser processing of doped silicon wafer by the Stealth Dicing

Masayoshi Kumagai,, Takeshi Sakamoto,, Etsuji Ohmura,

Year:

2007

Language:

english

File:

PDF, 1.63 MB

english, 2007

8

Thermal Stress Analysis on Laser Scribing of Glass

YAMAMOTO, Koji, HASAKA, Noboru, MORITA, Hideki, OHMURA, Etsuji

Journal:

Journal of the Japan Society for Precision Engineering Contributed Papers

Year:

2005

File:

PDF, 1.78 MB

2005

9

[Laser Institute of America ICALEO® 2007: 26th International Congress on Laser Materials Processing, Laser Microprocessing and Nanomanufacturing - Orlando, Florida, USA (October 29–November 1, 2007)] International Congress on Applications of Lasers & Electro-Optics - Modeling of laser drilling considering multiple reflection of laser, evaporation and melt flow

Noguchi, Satoru, Ohmura, Etsuji, Harp, William Ray, Tu, Jay, Hirata, Yoshinori

Year:

2007

File:

PDF, 620 KB

2007

10

Thermally stabilized photoinduced Bragg gratings

Nishii, Junji, Kintaka, Kenji, Nishiyama, Hiroaki, Sano, Tomokazu, Ohmura, Etsuji, Miyamoto, Isamu

Journal:

Applied Physics Letters

Year:

2002

Language:

english

File:

PDF, 222 KB

english, 2002

11

Influence of glass substrate thickness in laser scribing of glass

Koji Yamamoto, Noboru Hasaka, Hideki Morita, Etsuji Ohmura

Journal:

Precision Engineering

Year:

2010

Language:

english

File:

PDF, 1.80 MB

english, 2010

12

Femtosecond laser quenching of the ɛ phase of iron

Sano, Tomokazu, Mori, Hiroaki, Ohmura, Etsuji, Miyamoto, Isamu

Journal:

Applied Physics Letters

Year:

2003

Language:

english

File:

PDF, 247 KB

english, 2003

13

SPIE Proceedings [SPIE Second International Symposium on Laser Precision Micromachining - Singapore, Singapore (Wednesday 16 May 2001)] Second International Symposium on Laser Precision Microfabrication - Scattering of evaporation particles in ultrashort-pulse laser ablation

Ohmura, Etsuji, Fukumoto, Ichirou, Miyamoto, Isamu, Miyamoto, Isamu, Lu, Yong Feng, Sugioka, Koji, Dubowski, Jan J.

Year:

2002

Language:

english

File:

PDF, 353 KB

english, 2002

14

10.1299/kikaib.50.2436

OHMURA, Etsuji, NAMBA, Yoshiharu, MAKINOUCHI, Saburo, SEKIMOTO, Yoshihiro

Journal:

TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series B

Year:

1984

File:

PDF, 951 KB

1984

15

Thermohydrodynamics Analysis on Mechanism of Bump Formation in Laser Texturing.

MURAYAMA, Rina, OHMURA, Etsuji, MIYAMOTO, Isamu, HARA, Hiroki, INOUE, Naoki

Journal:

QUARTERLY JOURNAL OF THE JAPAN WELDING SOCIETY

Year:

2000

File:

PDF, 1.45 MB

2000

16

SPIE Proceedings [SPIE High-Power Lasers and Applications - San Jose, CA (Saturday 25 January 2003)] Photon Processing in Microelectronics and Photonics II - Femtosecond pulsed laser induced phase transition in iron

Sano, Tomokazu, Mori, Hiroaki, Ohmura, Etsuji, Miyamoto, Isamu, Pique, Alberto, Sugioka, Koji, Herman, Peter R., Fieret, Jim, Bachmann, Friedrich G., Dubowski, Jan J., Hoving, Willem, Washio, Kunihiko

Year:

2003

Language:

english

File:

PDF, 87 KB

english, 2003

17

SPIE Proceedings [SPIE Fourth International Symposium on laser Precision Microfabrication - Munich, Germany (Saturday 21 June 2003)] Fourth International Symposium on Laser Precision Microfabrication - Preparation of channel waveguides with extremely thermally stabilized laser-induced gratings

Nishiyama, Hiroaki, Miyamoto, Isamu, Ostendorf, Andreas, Sano, Tomokazu, Ohmura, Etsuji, Sugioka, Koji, Helvajian, Henry, Miyamoto, Isamu, Matsumoto, Shin-ichi, Saito, Mitsunori, Kintaka, Kenji, Nishi

Year:

2003

Language:

english

File:

PDF, 136 KB

english, 2003

18

OS0104 Analysis of Crack Propagation in Stealth Dicing Using Stress Intensity Factor

Ohmura, Etsuji, Ogawa, Kensuke, Kumagai, Masayoshi, Nakata, Makoto, Fukumitsu, Kenshi, Morita, Hideki

Journal:

The Proceedings of the Materials and Mechanics Conference

Year:

2009

File:

PDF, 475 KB

2009

19

Femtosecond Laser Driven Shock Quenching of the Nanocrystalline High-Pressure Phase of Iron

Sano, Tomokazu, Mori, Hiroaki, Sakata, Osami, Ohmura, Etsuji, Miyamoto, Isamu, Hirose, Akio, Kobayashi, Kojiro F.

Journal:

Materials Science Forum

Year:

2005

Language:

english

File:

PDF, 355 KB

english, 2005

20

A012 Internal Processing of Glass by Ultrashort Pulse Laser and Analysis of Its Processing Phenomena

KOMATSUBARA, Nobuaki, OHMURA, Etsuji

Journal:

Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21

Year:

2013

File:

PDF, 213 KB

2013

21

SPIE Proceedings [SPIE Fourth International Symposium on laser Precision Microfabrication - Munich, Germany (Saturday 21 June 2003)] Fourth International Symposium on Laser Precision Microfabrication - Influence of temporal pulse shape on second harmonic generation

Ohmura, Etsuji, Nomura, Kazufumi, Miyamoto, Isamu, Miyamoto, Isamu, Ostendorf, Andreas, Sugioka, Koji, Helvajian, Henry

Year:

2003

Language:

english

File:

PDF, 278 KB

english, 2003

22

SPIE Proceedings [SPIE SPIE Proceedings - (Sunday 12 February 2012)] - Analysis of second harmonic generation considering laser absorption with repetitive irradiation

Nomura, Kazufumi, Ohmura, Etsuji, Hirata, Yoshinori, Drabovich, Konstantin, Makarov, Vladimir, Shen, Yuen-Ron

Year:

2012

Language:

english

File:

PDF, 632 KB

english, 2012

23

Computer simulation on structural changes of hypo-eutectoid steel in laser transformation hardening process.

INOUE, Katsunori, OHMURA, Etsuji, HARUTA, Koichi

Journal:

TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series C

Year:

1988

File:

PDF, 1.20 MB

1988

24

10.1299/kikaic.45.1305

OHMURA, Etsuji, MAKINOUCHI, Saburo, YAMAGATA, Keiichi

Journal:

TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series C

Year:

1979

File:

PDF, 992 KB

1979

25

Chromium Thin Film Ablation with Double Pulses of Femtosecond Laser

OHMURA, Etsuji, Okamoto, Tomohiro, Fujiwara, Seiji, Sano, Tomokazu, MIYAMOTO, Isamu

Journal:

Journal of the Japan Society for Precision Engineering Contributed Papers

Year:

2005

File:

PDF, 1.37 MB

2005

26

[Laser Institute of America PICALO 2008: 3rd Pacific International Conference on Laser Materials Processing, Micro, Nano and Ultrafast Fabrication - Beijing, People’s Republic of China (April 16–18, 2008)] Pacific International Conference on Applications of Lasers and Optics - Innovative laser technology for semiconductor manufacturing – Stealth dicing

Ohmura, Etsuji, Kumagai, Masayoshi, Morita, Hideki

Year:

2008

File:

PDF, 959 KB

2008

27

Development of a Machine Tool for Machining Fine Micro-hole on Glass and Ceramic Materials.

Eda, Hiroshi, Ohmura, Etsuji, Yohanes, Baptista Satya Sananugraha, Iso, Machiko

Journal:

TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series C

Year:

1995

File:

PDF, 690 KB

1995

28

Molecular Dynamics Analysis on Elementary Process of Coating by High-Temperature and High-Speed Droplet (Flattening Process and Atomic Behavior of Droplet)

SHIMIZU, Jun, OHMURA, Etsuji, KOBAYASHI, Yoshifumi, KIYOSHIMA, Shoichi, EDA, Hiroshi

Journal:

TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series C

Year:

2005

File:

PDF, 9.99 MB

2005

29

SPIE Proceedings [SPIE SPIE LASE - San Francisco, California, United States (Saturday 13 February 2016)] Laser-based Micro- and Nanoprocessing X - Heat transfer analysis of two wavelengths laser microprocessing inside glass

Klotzbach, Udo, Washio, Kunihiko, Arnold, Craig B., Matsumoto, Aoi, Tamaki, Takayuki, Enoki, Shinichi, Yahata, Keisuke, Ohmura, Etsuji

Year:

2016

Language:

english

File:

PDF, 734 KB

english, 2016

30

[Laser Institute of America ICALEO® ‘99: Proceedings of the Laser Materials Processing Conference - San Diego, California, USA (November 15–18, 1999)] International Congress on Applications of Lasers & Electro-Optics - In-process monitoring of weld qualities using multi photo-sensor system in pulsed Nd:YAG laser welding

Ikeda, Takuo, Kojima, Tsuneaki, Tu, J. F., Ohmura, Etsuji, Miyamoto, Isamu, Nagashima, Tadashi, Tsubota, Shuhou, Ishide, Takashi

Year:

2000

Language:

english

File:

PDF, 3.80 MB

english, 2000

31

[Laser Institute of America ICALEO® 2004: 23rd International Congress on Laser Materials Processing and Laser Microfabrication - San Francisco, California, USA (October 4–7, 2004)] International Congress on Applications of Lasers & Electro-Optics - Chromium thin film ablation with double pulse of femtosecond laser

Ohmura, Etsuji, Okamoto, Tomohiro, Fujiwara, Seiji, Sano, Tomokazu, Miyamoto, Isamu

Year:

2004

Language:

english

File:

PDF, 420 KB

english, 2004

32

Molecular Dynamics Simulation of Laser Shock Phenomena.

OHMURA, Etsuji, FUKUMOTO, Ichirou, MIYAMOTO, Isamu

Journal:

Journal of the Japan Society for Precision Engineering

Year:

2000

File:

PDF, 6.08 MB

2000

33

SPIE Proceedings [SPIE LAMP 2002: International Congress on Laser Advanced Materials Processing - Osaka, Japan (Monday 27 May 2002)] Third International Symposium on Laser Precision Microfabrication - Electron emission at an early stage of femtosecond pulsed laser ablation

Murai, Makoto, Sano, Tomokazu, Ohmura, Etsuji, Miyamoto, Isamu, Miyamoto, Isamu, Kobayashi, Kojiro F., Sugioka, Koji, Poprawe, Reinhart, Helvajian, Henry

Year:

2003

Language:

english

File:

PDF, 115 KB

english, 2003

34

Thermal Stress Analysis on Laser Cross Scribe of Glass

YAMAMOTO, Koji, HASAKA, Noboru, MORITA, Hideki, OHMURA, Etsuji

Journal:

Journal of the Japan Society for Precision Engineering

Year:

2008

File:

PDF, 6.08 MB

2008

35

SPIE Proceedings [SPIE LAMP 2002: International Congress on Laser Advanced Materials Processing - Osaka, Japan (Monday 27 May 2002)] Third International Symposium on Laser Precision Microfabrication - Influence of laser absorption by nonlinear optical crystal on SHG efficiency

Ohmura, Etsuji, Nomura, Kazufumi, Miyamoto, Isamu, Miyamoto, Isamu, Kobayashi, Kojiro F., Sugioka, Koji, Poprawe, Reinhart, Helvajian, Henry

Year:

2003

Language:

english

File:

PDF, 476 KB

english, 2003

36

SPIE Proceedings [SPIE LAMP 2002: International Congress on Laser Advanced Materials Processing - Osaka, Japan (Monday 27 May 2002)] Third International Symposium on Laser Precision Microfabrication - Micro welding of ultra thin metal foil using Yb-fiber laser

Park, Seo-jeong, Ohmura, Etsuji, Miyamoto, Isamu, Miyamoto, Isamu, Kobayashi, Kojiro F., Sugioka, Koji, Poprawe, Reinhart, Helvajian, Henry

Year:

2003

Language:

english

File:

PDF, 612 KB

english, 2003

37

SPIE Proceedings [SPIE Second International Symposium on Laser Precision Micromachining - Singapore, Singapore (Wednesday 16 May 2001)] Second International Symposium on Laser Precision Microfabrication - Temperature dependence of SHG conversion efficiency of nonlinear optical crystal

Ohmura, Etsuji, Taniguchi, Tatsuya, Miyamoto, Isamu, Miyamoto, Isamu, Lu, Yong Feng, Sugioka, Koji, Dubowski, Jan J.

Year:

2002

Language:

english

File:

PDF, 141 KB

english, 2002

38

SPIE Proceedings [SPIE Photonics Europe - Strasbourg, France (Monday 26 April 2004)] Photon Management - Distortion analysis of beam profile and pulse shape of second harmonic due to repetitive irradiation of picosecond pulses

Ohmura, Etsuji, Wyrowski, Frank, Nomura, Kazufumi, Miyamoto, Isamu

Year:

2004

Language:

english

File:

PDF, 341 KB

english, 2004

39

10.1299/kikaic.50.1099

NAMBA, Yoshiharu, OHMURA, Etsuji, MAKINOUCHI, Saburo

Journal:

TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series C

Year:

1984

File:

PDF, 1.01 MB

1984

40

Measurement by laser flash method of thermal diffusivity of two-layer composites.

Inoue, Katsunori, Ohmura, Etsuji

Journal:

QUARTERLY JOURNAL OF THE JAPAN WELDING SOCIETY

Year:

1988

Language:

english

File:

PDF, 362 KB

english, 1988

41

Thermal stress analysis on laser cross scribe of glass

Yamamoto, Koji, Hasaka, Noburu, Morita, Hideki, Ohmura, Etsuji

Journal:

Journal of Laser Applications

Year:

2010

Language:

english

File:

PDF, 591 KB

english, 2010

42

SPIE Proceedings [SPIE Fourth International Symposium on laser Precision Microfabrication - Munich, Germany (Saturday 21 June 2003)] Fourth International Symposium on Laser Precision Microfabrication - Theoretical analysis of second harmonic characteristics generated by KTiOPO4 crystal

Nomura, Kazufumi, Ohmura, Etsuji, Horn, Alexander, Miyamoto, Isamu, Miyamoto, Isamu, Ostendorf, Andreas, Sugioka, Koji, Helvajian, Henry

Year:

2003

Language:

english

File:

PDF, 290 KB

english, 2003

43

Three Dimensional Thermal Stress Analysis on Laser Scribing of Glass

YAMAMOTO, Koji, HASAKA, Noboru, MORITA, Hideki, OHMURA, Etsuji

Journal:

TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series C

Year:

2006

File:

PDF, 10.94 MB

2006

44

[Laser Institute of America PICALO 2008: 3rd Pacific International Conference on Laser Materials Processing, Micro, Nano and Ultrafast Fabrication - Beijing, People’s Republic of China (April 16–18, 2008)] Pacific International Conference on Applications of Lasers and Optics - Innovative laser technology for semiconductor manufacturing – Stealth dicing

Ohmura, Etsuji, Kumagai, Masayoshi, Morita, Hideki

Year:

2008

Language:

english

File:

PDF, 959 KB

english, 2008

45

Partial growth of crack in laser scribing of glass

Yamamoto, Koji, Hasaka, Noboru, Morita, Hideki, Ohmura, Etsuji

Journal:

Journal of Laser Applications

Year:

2009

Language:

english

File:

PDF, 612 KB

english, 2009

46

SPIE Proceedings [SPIE LAMP 2002: International Congress on Laser Advanced Materials Processing - Osaka, Japan (Monday 27 May 2002)] Third International Symposium on Laser Precision Microfabrication - Femtosecond laser ablation of Cr-SiO2 binary mask

Okamoto, Tomohiro, Morishige, Yukio, Ohmura, Etsuji, Sano, Tomokazu, Miyamoto, Isamu, Miyamoto, Isamu, Kobayashi, Kojiro F., Sugioka, Koji, Poprawe, Reinhart, Helvajian, Henry

Year:

2003

Language:

english

File:

PDF, 581 KB

english, 2003

47

Microstructure of hypo-eutectoid steel in laser hardening process.

OHMURA, Etsuji, NAMBA, Yoshiharu

Journal:

TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series A

Year:

1985

File:

PDF, 1.38 MB

1985

48

[Laser Institute of America ICALEO® 2002: 21st International Congress on Laser Materials Processing and Laser Microfabrication - Scottsdale, Arizona, USA (October 14–17, 2002)] International Congress on Applications of Lasers & Electro-Optics - Laser-Absorption dependence of SHG conversion efficiency by nonlinear optical crystal

Ohmura, Etsuji, Nomura, Kazufumi, Miyamoto, Isamu

Year:

2002

Language:

english

File:

PDF, 292 KB

english, 2002

49

Molecular Dynamics Simulation on Laser Ablation of Metal and Silicon.

OHMURA, Etsuji, FUKUMOTO, Ichirou, MIYAMOTO, Isamu

Journal:

Journal of the Japan Society for Precision Engineering

Year:

1998

File:

PDF, 1.29 MB

1998

50

[Laser Institute of America ICALEOÂ® â97: Proceedings of the Laser Materials Processing Conference - San Diego, California, USA (November 17â20, 1997)] International Congress on Applications of Lasers & Electro-Optics - Dynamic behavior of plume and keyhole in CO2 laser welding

Miyamoto, Isamu, Ohmura, Etsuji, Maede, Takeo

Year:

1997

File:

PDF, 5.21 MB

1997

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